[Synergy of Technology×Technique]
Spectra Ultra S/TEM—State-of-the-Art Instruments and Skilled Engineers Enable Advanced Nanostructure Analysis

• Advanced Characterization Techniques
• Analysis and Evaluation Techniques
• Engineers
• Research Network and Facility Services Division Platforms
• Shared Facilities

The Electron Microscopy Unit provides researchers with expert support for observing materials and devices using scanning electron microscopy (SEM) and transmission electron microscopy (TEM), as well as for preparing specimens with focused ion beam (FIB) systems. While the performance of these instruments continues to improve significantly, fully utilizing them requires specialized expertise. TEM techniques, for example, offer multiple imaging modes and a variety of optional functions. Selecting the appropriate equipment and optimizing its settings demand deep, up-to-date technical knowledge. Our experienced engineers offer high-quality support to ensure accurate and reliable nanostructure analysis results. 

A key focus of the unit is to enhance its services by adopting cutting-edge technologies. In 2024, the Spectra Ultra S/TEM was introduced to NIMS for internal research use. One key innovation of this instrument is its high-speed accelerating voltage switching, enabling rapid optimization of the voltage for specimen observation. Seamless transitions between voltages within a single session enhance flexibility in imaging and spectroscopy. Additionally, the world’s highest-performance elemental analysis system allows for fast, high-resolution elemental mapping. External researchers can access this cutting-edge tool through collaborative research with NIMS researchers.

However, TEM has limitations, particularly in the quantitative analysis of light elements and the detection of trace elements as rare as one atom among millions. These challenges can be addressed by three-dimensional atom probe (3DAP), which enables 3D elemental mapping of materials and devices. By using TEM and 3DAP complementarily, highly advanced nanostructure analysis can be performed. In October 2024, a cutting-edge 3DAP instrument, the Invizo 6000, became available at NIMS for shared use. As one of the few engineers proficient in both TEM and 3DAP, I am committed to advancing nanostructure analysis and contributing to the development of innovative materials and devices.

Spectra Ultra S/TEM（for internal use within NIMS only）

For external-use equipment managed by the Electron Microscopy Unit
Electron Microscopy Unit: Facilities List